Shorten observation time with high-throughput scanning
Through the newly developed HT scanner that can respond quickly and the optimization of software and control system design, we have successfully achieved image data acquisition at more than 5 times the speed of traditional devices (compared to our company).

The scanner can be easily replaced, so traditional scanners can be used. In addition, efficient analysis of the equipment can be achieved by adding an HT scanner to the original SPM-9700.

Analyze case studies

• Surface roughness analysis of metal vapor deposition film

Observe the surface morphology of metal vapor deposited films at scanning speeds of 1Hz and 5Hz. The analysis results of image quality and surface roughness are the same.

• Grating groove shape detection

Observe the surface morphology of the grating at scanning speeds of 1Hz and 5Hz. After analyzing the cross-sectional shape, the results of groove shape detection are consistent.